MEMS Optical Shutter

Description

Thermal Micro-Mirror Shutter (TMMS) series chips can be used to produce barrier type MEMS variable optical shutter devices. Based on Sanhero’s specific thermal actuator design, the chip is produced using silicon material by a unique MEMS process. It has the following characteristics, such as large moving distance, within 5V low drive voltage, low requirement to package, good optical performance and high stability.


Features


· Thermal Driven
· Despense with Seal Package
· Large Moving Distance
· Fast Response


Applications


· Signal Attenuation
· Signal Balance
· Laser System Integration (Modulator)
· OADM
· VMUX
· EDFA

 

                                SCHEMATIC CROSS SECTION VIEW

 

 

                                             SCHEMATIC CONFIGURATION