MEMS VOA Chips

Description


Thermal Micro-Mirror Actuator (TMMA) series chips can be used to produce barrier type MEMS variable optical attenuator devices. Based on Sanhero’s specific thermal actuator design, the chip is produced using silicon material by a unique MEMS process. It has the following characteristics, such as compact structure, within 5V low drive voltage, low requirement to package, good optical performance and high stability.


Features


· Thermal Driven
· Despense with Seal Package
· Large Attenuation Range
· Anti-Vibration
· Fast Response
· High Stability

 

Applications


· Signal Attenuation
· Signal Balance
· Network Monitor and Detection
· OADM
· VMUX
· EDFA 
· TOSA & ROSA

 

                                   SCHEMATIC CROSS SECTION VIEW


Schematic Cross Section View

 

                                             SCHEMATIC CONFIGURATION